I have to say one of my favorite scenes in Ep.III is when Vaders mask is fitted to his head and you hear the suction kicking in and the air flow. And then the first breath of Darth Vader. That was such an iconic scene and I was moved by it. I must also say that coming home and watching parts of Ep. IV,V and VI cut much deeper when I see Darth Vader. He really is a tragic character.